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Production Process
0.13 um D pHEMT Foundry Service
Features
0.13 um pHEMT (TQP13-N) Process Cross-section
• • • • • • Low cost Optical Lithography 0.13um Gate High Ft, ~95 GHz
TQP13-N
Low Noise, < 0.5 dB in Ku-band Interconnects: 2 layers (1 Airbridge & 1 local) High Value MIM Capacitor Resistors • Thin film resistor • Epi resistor
0.13 um pHEMT Device Cross-Section
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Backside Vias High Volume 150 mm Wafers Same Baseline as Mass Production Today
General Description
TriQuint's TQP13-N process is a unique, low-cost 150mm wafer, optical lithography 0.13um pHEMT process used for low noise and medium power applications in Ku-band through V-band applications. The process features a highly repeatable 0.