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MS7912 Datasheet - Intersema

MS7912-Intersema.pdf

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Datasheet Details

Part number:

MS7912

Manufacturer:

Intersema

File Size:

253.42 KB

Description:

Pressure sensor die.

MS7912, PRESSURE SENSOR DIE

The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum.

Implanted resistors make use of the piezo-resistive effect.

The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas th

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