Datasheet Details
Part number:
MS761
Manufacturer:
Intersema
File Size:
240.19 KB
Description:
Pressure sensor die.
Datasheet Details
Part number:
MS761
Manufacturer:
Intersema
File Size:
240.19 KB
Description:
Pressure sensor die.
MS761, PRESSURE SENSOR DIE
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum.
Implanted resistors make use of the piezo-resistive effect.
The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the dif
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