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SM98A - Backside Absolute Pressure Sensor

The SM98A by Silicon Microstructures is a Backside Absolute Pressure Sensor. Below is the official datasheet preview.

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SM98A Backside Absolute Pressure Sensor by Silicon Microstructures - Datasheet Preview — Official preview page of the SM98A Backside Absolute Pressure Sensor datasheet (Silicon Microstructures).

Datasheet Details

Part number	SM98A
Manufacturer	Silicon Microstructures
File Size	481.71 KB
Description	Backside Absolute Pressure Sensor
Datasheet	SM98A-SiliconMicrostructures.pdf
Additional preview pages of the SM98A datasheet.

SM98A Product details

Description

The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip.

Features

Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA).
On-Board temperature sensing diode.
Small die (1.2 mm x 1.33 mm).
Backside entry for harsh environments.
Backside metal option for eutectic bonding.
80 Millivolt output at 5V.
All-silicon construction.
50 Bar version in development.

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Published: Aug 21, 2020 |