SM98A Datasheet (Silicon Microstructures) - Backside Absolute Pressure Sensor

SM98A, Backside Absolute Pressure Sensor

The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip.

The SM98A is designed for harsh media where absolute pressure needs to be accurately measured.

In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials.

Therefore, the electron

SM98A Features

* Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)

* On-Board temperature sensing diode

* Small die (1.2 mm x 1.33 mm)

* Backside entry for harsh environments

* Backside metal option for eutectic bonding

* 80 Millivolt output at 5V

* All-si