SM97A Datasheet (Silicon Microstructures)

SM97A, Absolute Pressure Sensor

The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip.

The SM97A is designed for harsh media where absolute pressure needs to be accurately measured.

In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials.

Therefore, the electron

SM97A Features

* Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)

* Support up to 25 times FS Burst Pressure

* Integrated temperature sensor

* Small die (1.2 mm x 1.33 mm)

* Backside entry for harsh environments

* 90 Millivolt output at 5 V

* All-silicon