KX310CR-MZ Datasheet | ROHM

Accelerometer Series KionixTM Technology Accelerometer IC for Automotive General Description KX310CR-MZ is a MEMS capacitive 3-axis accelerometer using KionixTM Technology.(Note 1) Acceleration ranges of ±2 g, ±4 g and ±8 g are supported. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element which further utilize mon mode cancellation to decrease errors from process variation, temperature, and environmental stress. (Note 1) Kionix™ Technology is defined by the proprietary plasma micromachining process and the technology to hermetically seal at a wafer level by bonding the silicon...