A9R14.1-1400DAL Datasheet Single Axis Resonant Integrated MEMS Mirrors

Manufacturer: Mirrorcle

Download the A9R14.1-1400DAL datasheet PDF. This datasheet also includes the A9R8.1-800DAL variant, as both parts are published together in a single manufacturer document.

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A9R14.1-1400DAL single axis resonant integrated mems mirrors by Mirrorcle - Datasheet Preview — Note: The manufacturer provides a single datasheet file (A9R8.1-800DAL-Mirrorcle.pdf) that lists specifications for multiple related part numbers.

Datasheet Details

Part number	A9R14.1-1400DAL
Manufacturer	Mirrorcle
File Size	872.38 KB
Description	Single Axis Resonant Integrated MEMS Mirrors
Datasheet	A9R14.1-1400DAL Datasheet

Overview

Single Axis Resonant Integrated MEMS Mirrors Datasheet A9R Series: A9R8.1-800DAL, A9R12.1-1200DAL, A9R14.1-1400DAL OVERVIEW Mirrorcle Technologies Single-Axis Resonant MEMS Mirrors are based on proprietary fabrication technology.

They provide fast optical beam steering, while requiring ultra-low power.

The mirrors deflect laser beams or images to optical scanning angles of up to ±18°.

Key Features

 Single-axis Resonant Integrated MEMS Mirror  0.8mm, 1.2mm, 1.4mm diameter mirrors  Flat, Aluminum-coated mirror  ±8.5° Mechanical (Resonant Only) Rotation  Electro-static Actuation  Ultra-low power consumption  High robustness and reliability  Wide operating temperature range  Window options for visible and IR wavelengths.

More Datasheets from Mirrorcle

Part Number	Description
A9R12.1-1200DAL	Single Axis Resonant Integrated MEMS Mirrors
A9R8.1-800DAL	Single Axis Resonant Integrated MEMS Mirrors
A9RB.1-1600	Single Axis Resonant Bonded MEMS Mirrors
A9RB.1-2000	Single Axis Resonant Bonded MEMS Mirrors
A9RB.1-2400	Single Axis Resonant Bonded MEMS Mirrors