A9R12.1-1200DAL Datasheet | Mirrorcle

OVERVIEW Mirrorcle Technologies Single-Axis Resonant MEMS Mirrors are based on proprietary fabrication technology. They provide fast optical beam steering, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±18°. pared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous operation of the electro-static actuators that drive the mirror tilt rotation dissipates less than 1m W of power. Mirrorcle Technologies MEMS Mirrors are made entirely of monolithic Single-Crystal Silicon (SCS), resulting in excellent repeatability and reliability. Flat, smooth mirror surfaces are coated with a thin film of metal with high broadband reflectance. FEATURES  Single-axis Resonant Integrated MEMS Mirror  0.8mm, 1.2mm, 1.4mm diameter mirrors  Flat, Aluminum-coated mirror  ±8.5° Mechanical (Resonant Only) Rotation  Electro-static Actuation  Ultra-low power...