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PHOTODIODE
Si photodiode
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S9089
Highly reliable quartz window photodiode for VUV detection
S9089 is a VUV (vacuum ultraviolet) sensitive Si photodiode ideal for ArF (λ=193 nm) excimer laser detection. Compared to conventional types, S9089 offers improved sensitivity stability against VUV irradiation. The package is hermetically sealed by a newly developed quartz window that keeps it fully airtight and highly reliable. This package is also easier to handle than S8551 windowless type photodiode.
Features
Applications
l Highly reliable quartz window l High reliable detection of ArF excimer laser (λ=193 nm) l Active area: 5.8 × 5.8 mm l TO-8 metal package
l ArF (λ=193 nm), KrF (λ=248 nm) excimer laser l UV light detection, etc.
S9089 Datasheet
