Description
The SM7221, SM7321 & SM7421 series is a digital, low pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical porting option.
Features
- Pressure ranges from 0.15 to 0.29 psi; gauge, differential and asymmetric outputs.
- Accuracy: ±1% full scale.
- 14-bit digital, pressure calibrated and temperature compensated
output.
- I2C Digital Interface.
- Compensated temperature range: -20 to 85oC.
- Insensitive to mounting orientation.
- Robust JEDEC SOIC-16 package for automated assembly.
- Manufactured according to ISO9001 and ISO/TS 16949 standards.
SM7221-SiliconMicrostructures.pdf