SM1491, SM1291 Datasheet (Silicon Microstructures) - Gauge and Differential Pressure Sensor

SM1491, SM1291, Gauge and Differential Pressure Sensor

The SM1X91 series are a medium pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce both digital & analog output, fully conditioned, multi-order pressure and temperature compensated outputs.

This series provides t

SM1491 Features

* 15 psi gauge, differential or asymmetric differential outputs

* Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS

* 16-bit digital, pressure calibrated and temperature compensated output

* I2C and analog output interface available

* Compensated tempe