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Freescale Semiconductor
100 kPa On-Chip Temperature Compensated Silicon Pressure Sensors
The MPX2102 series devices are silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation.
Features
• Temperature Compensated Over 0°C to +85°C • Easy-to-Use Chip Carrier Package Options • Available in Absolute, Differential and Gauge Configurations • Absolute, Differential and Gauge Options
Pressure
Document Number: MPX2102 Rev 9, 01/2012
MPX2102 Series
0 to 100 kPa (0 to 14.