Datasheet Details
Part number:
A9R14.1-1400DAL, A9R8.1-800DAL
Manufacturer:
Mirrorcle
File Size:
872.38 KB
Description:
Single axis resonant integrated mems mirrors.
Note:
This datasheet PDF includes multiple part numbers: A9R14.1-1400DAL, A9R8.1-800DAL.
Please refer to the document for exact specifications by model.
A9R14.1-1400DAL, A9R8.1-800DAL, Single Axis Resonant Integrated MEMS Mirrors
Single Axis Resonant Integrated MEMS Mirrors Datasheet A9R Series: A9R8.1-800DAL, A9R12.1-1200DAL, A9R14.1-1400DAL OVERVIEW Mirrorcle Technologies Single-Axis Resonant MEMS Mirrors are based on proprietary fabrication technology.
They provide fast optical beam steering, while requiring ultra-low power.
The mirrors deflect laser beams or images to optical scanning angles of up to ±18°.
Compared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude
A9R14.1-1400DAL Features
* Single-axis Resonant Integrated MEMS Mirror 0.8mm, 1.2mm, 1.4mm diameter mirrors Flat, Aluminum-coated mirror ±8.5° Mechanical (Resonant Only) Rotation Electro-static Actuation Ultra-low power consumption High robustness and reliability Wide operating temperature range Window optio
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