Click to expand full text
www.DataSheet4U.com Freescale Semiconductor
Technical Data
Document Number: MPXM2053 Rev 5.0, 05/2006
50 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors
The MPXM2053 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output - directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation.