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SM98A Datasheet

Backside Absolute Pressure Sensor

Manufacturer: Silicon Microstructures

Datasheet Details

Part number SM98A
Manufacturer Silicon Microstructures
File Size 481.71 KB
Description Backside Absolute Pressure Sensor
Datasheet SM98A-SiliconMicrostructures.pdf

SM98A Overview

The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM98A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only es in contact with silicon materials.

SM98A Key Features

  • Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
  • On-Board temperature sensing diode
  • Small die (1.2 mm x 1.33 mm)
  • Backside entry for harsh environments
  • Backside metal option for eutectic bonding
  • 80 Millivolt output at 5V
  • All-silicon construction
  • 50 Bar version in development

SM98A Distributor