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SM5391 Datasheet, Silicon Microstructures

SM5391 sensor equivalent, gauge and differential pressure sensor.

SM5391 Avg. rating / M : 1.0 rating-14

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SM5391 Datasheet

Features and benefits


* Pressure range from 0.8 to 2.49 psi; gauge, differential or asymmetric differential outputs
* Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS
* 16.

Description

The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature c.

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SM5391 Page 1 SM5391 Page 2 SM5391 Page 3

TAGS

SM5391
Gauge
and
Differential
Pressure
Sensor
Silicon Microstructures

Manufacturer


Silicon Microstructures

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