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MiCS-6814 Data Sheet 1143 rev 8
The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package.
The MiCS-6814 is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors.
Features
• Smallest footprint for compact designs (5 x 7 x 1.55 mm) • Robust MEMS sensor for harsh environments • High-volume manufacturing for low-cost applications • Short lead-times
Rs/R0 Rs/R0
10.00 Etha1n0o.0l0 Hydrogen
1.00 1.00
CO H2S
CO
0.10 Ethanol 0.10
Hydrogen
Ammonia Ammonia
Methane Methane
Propane Propane
Iso-butane Iso-butane
0.01
0.001.1
1
10
100
1000
10000
0.1
1
10
100
1000
10000
Concentration [ppm]
Concentration [ppm]
RED sensor, continuous power ON, 25°C, 50% RH
100000 100000
100.
MiCS-6814 Datasheet
