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MiCS-2614 Data Sheet 1087 rev 4
The MiCS-2614 is a compact MOS sensor.
The MiCS-2614 is a robust MEMS sensor for ozone detection; suitable also for gas leak detection and outdoor air quality monitoring.
Features
• Smallest footprint for compact designs (5 x 7 x 1.55 mm) • Robust MEMS sensor for harsh environments • High-volume manufacturing for low-cost applications • Short lead-times
Detectable gases
• Ozone
O3
10 – 1000ppb
RS / R 100ppb
10
1
0.1
0.01 10
100 O3 [ppb]
Continuous power ON, 25°C, 50% RH
1000
For more information please contact:
info.em@sgxsensortech.com
SGX Sensortech, Courtils 1 CH-2035 Corcelles-Cormondrèche Switzerland
www.sgxsensortech.
MiCS-2614 Datasheet
