MiCS-2614 sensor equivalent, mos sensor.
* Smallest footprint for compact designs (5 x 7 x 1.55 mm)
* Robust MEMS sensor for harsh environments
* High-volume manufacturing for low-cost applications <.
* Short lead-times
Detectable gases
* Ozone
O3
10
– 1000ppb
RS / R 100ppb
10
1
0.1
0.01.
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