1) Small power mold type. (PMDS) 2) Low IR. 3) High reliability Construction Silicon epitaxial planer 2.6±0.2 34 ①② 1.5 ±0.2 0.1±0.02 0.1 2.0±0.2 4.5±0.2 1.2±0.3 5.0±0.3 2.0 4.2 Land size fi.