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UV/EUV CONTINUOUS POSITION SENSOR
ODD-SXUV-DLPSD
FEATURES
• Submicron position resolution • Stable response after exposure to UV/EUV • 5 mm x 5 mm active area • TO-8 windowless package
RoHS
ELECTRO-OPTICAL CHARACTERISTICS AT 25°C
PARAMETERS
TEST CONDITIONS
Active Area Responsivity, R Responsivity, R
@ 13 nm @ 254 nm
Dark Current ldr Reverse Breakdown Voltage, VR Capacitance, C Rise Time Shunt Resistance Inter Electrode Resistance
VR = 30 V IR = 1 µA VR = 30 V VR = 30 V, RL = 50Ω Vr = ± 10 mV
Temp Coefficient of ID
Position Non-Linearity1
1Valid within 80% of length
THERMAL PARAMETERS STORAGE AND OPERATING TEMPERATURE RANGE Ambient Nitrogen or Vacuum Maximum Junction Temperature Lead Soldering Temperature1
10.08" from case for 10 seconds
MIN
50 5 5,000
TYP 25 0.2 0.
ODD-SXUV-DLPSD Datasheet
