MFC2000 sensor equivalent, high performance bi-directional digital mems gas flow sensor.
* Bi-directional flow (±30 or ±70SLM)
* High dynamic range
* ±3% m.v. accuracy
* ±0.8% m.v. repeatability
* Low power consumption
* Fast response .
* Medical gas flow measurement and control
* Industrial gas flow measurement and control
* Consumer products.
MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/3.0% accuracy.
The sensing element is monolithically in.
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