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FEATURES • Integrated X- and Y-axis gyros on a single chip • Two separate outputs per axis for standard and high
sensitivity: X-/Y-Out Pins: 500°/s full scale range 2.0mV/°/s sensitivity
X/Y4.5Out Pins: 110°/s full scale range 9.1mV/°/s sensitivity
• Integrated amplifiers and low-pass filters • Auto-Zero function • On-chip temperature sensor • High vibration rejection over a wide frequency range • High cross-axis isolation by proprietary MEMS design • 3V single-supply operation • Hermetically sealed for temp and humidity resistance • 10,000 g shock tolerant • Smallest dual axis gyro package at 4 x 5 x 1.