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Gas and Liquid Flow Sensor Module
FS1012
Datasheet
Description
The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo-transfer (calorimetric) principle. The FS1012 is capable of measuring a gas or liquid medium.
The FS1012 offers key advantages over resistor-based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio. The sensor comprises a “solid” thermal isolation technology and silicon-carbide coating to protect it from abrasive wear and provides robustness and long-term reliability. In comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base.
The FS1012 features the sensor fully assembled and wire-bonded out to a 6-pin header.
FS1012 Datasheet
