AWM5000 sensors equivalent, (awm series) airflow sensors.
ɀ State-of-the-art silicon micromachining ɀ Sensitive to low flows
– 0.1 sccm to 20 SLPM ɀ Adaptable for use with higher flows (See Application Note 2 pag.
ɀ Damper control for heating, ventilation, and air conditioning systems ɀ Gas analyzers ɀ Low vacuum control ɀ Process c.
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