include tungsten via plugs, Honeywell’s proprietary SHARP planarization process, and a lightly doped drain (LDD) structure for improved short channel reliability. A 7 tra.

Typ 5.0 25 Max 5.5 125 VDD+0.3 50 Units V °C V ms CAPACITANCE (1) Symbol CI CO Parameter Input Capacitance Output Capacitance Typical (1) 5 7 Worst Case Min Max 7 9 Units pF pF Test Conditions VI=VDD or VSS, f=1 MHz VIO=VDD or VSS, f=1 MHz (1) This.

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