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Tylan FC260/FM360 Mass Flow Controllers and Flowmeters
Low cost mass flow controllers with long-term repeatability and performance
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Process Values
Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elastomer-sealed mass flow controllers and meter. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.
Excellent Performance
Tylan FC260 qnd FM360 mass flow controllers and flowmeters accurately and reliably measure and control flow rates of gases up to 200 standard liters per minute without the need for pressure or temperature corrections.
FC262 Datasheet
