FC262 Datasheet Mass Flow Controllers and Flowmeters

Manufacturer: Unknown Manufacturer

FC262 mass flow controllers and flowmeters by Unknown Manufacturer - Datasheet Preview

Datasheet Details

Part number	FC262
Manufacturer	Unknown Manufacturer
File Size	151.64 KB
Description	Mass Flow Controllers and Flowmeters
Download	FC262 Download (PDF)

Overview

Tylan FC260/FM360 Mass Flow Controllers and Flowmeters Low cost mass flow controllers with long-term repeatability and performance ® Process Values Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elastomer-sealed mass flow controllers and meter.

These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.

Excellent Performance Tylan FC260 qnd FM360 mass flow controllers and flowmeters accurately and reliably measure and control flow rates of gases up to 200 standard liters per minute without the need for pressure or temperature corrections.

Key Features

Attitude Insensitive Flow Sensor Product Benefits Eliminates air convection currents inside its case without sacrificing response speed. Can be mounted in any position without requiring zero adjustment. Superior Bypass Design to Operate under Laminar Flow Conditions Solid State Valve Assembly Constructed of Type 316 Stainless Steel Laminar Flow Assures accuracy over the entire range of mass flow controller. Easily removed for range changes. Completely compatible with reactive and corrosive ma.

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