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Motorola Electronic Components Datasheet

MPX5700 Datasheet

INTEGRATED PRESSURE SENSOR

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MPX5700 pdf
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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by MPX5700/D
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The MPX5700 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
Features
2.5% Maximum Error over 0° to 85°C
Ideally Suited for Microprocessor or Microcontroller–Based Systems
Available in Differential and Gauge Configurations
Patented Silicon Shear Stress Strain Gauge
Durable Epoxy Unibody Element
VS
3
MPX5700
SERIES
INTEGRATED
PRESSURE SENSOR
0 to 700 kPa (0 to 101.5 psi)
0.2 to 4.7 V OUTPUT
BASIC CHIP
CARRIER ELEMENT
CASE 867–08, STYLE 1
X–ducer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1 Vout
DIFFERENTIAL
PORT OPTION
CASE 867C–05, STYLE 1
2 PINS 4, 5 AND 6 ARE NO CONNECTS
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
PIN NUMBER
1 Vout 4 N/C
2 Gnd 5 N/C
MAXIMUM RATINGS(1)
Parametrics
vOverpressure (P2 1 Atmosphere)
vBurst Pressure (P2 1 Atmosphere)
Symbol
P1max
P1burst
Value
2800
5000
3 VS 6 N/C
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
Unit to external circuitry or ground. Pin 1
kPa is noted by the notch in the Lead.
kPa
Storage Temperature
Tstg
– 40 to +125
°C
Operating Temperature
TA
– 40 to +125
°C
1. TC = 25°C unless otherwise noted. Maximum Ratings apply to Case 867–08 only.
2. Extended exposure at the specified limits may cause permanent damage or degradation to the device.
3. This sensor is designed for applications where P1 is always greater than, or equal to P2.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 2
©MMoottoororolal,aInSc.e1n9s97or Device Data
1


Motorola Electronic Components Datasheet

MPX5700 Datasheet

INTEGRATED PRESSURE SENSOR

No Preview Available !

MPX5700 pdf
MPX5700 SERIES
OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Pressure Range(1)
Supply Voltage(2)
POP
VS
0
4.75
Supply Current
Zero Pressure Offset(3)
Full Scale Output(4)
Full Scale Span(5)
Accuracy(6)
(0 to 85°C)
(0 to 85°C)
(0 to 85°C)
(0 to 85°C)
Io
Voff
VFSO
VFSS
0.088
4.587
Sensitivity
V/P —
Response Time(7)
tR —
Output Source Current at Full Scale Output
Warm–Up Time(8)
IO+ —
——
Decoupling circuit shown in Figure 4 required to meet electrical specifications.
Typ
5.0
7.0
0.2
4.7
4.5
6.4
1.0
0.1
20
Max
700
5.25
10
0.313
4.813
± 2.5
Unit
kPa
Vdc
mAdc
Vdc
Vdc
Vdc
%VFSS
mV/kPa
ms
mAdc
ms
MECHANICAL CHARACTERISTICS
Characteristic
Symbol
Min
Typ
Max Unit
Weight, Basic Element (Case 867)
— — 4.0 — Grams
Cavity Volume
Volumetric Displacement
— — — 0.01 IN3
0.001
IN3
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.
5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
TcSpan:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative
to 25°C.
Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C.
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm–up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.
9. P2 max is 500 kPa.
2 Motorola Sensor Device Data


Part Number MPX5700
Description INTEGRATED PRESSURE SENSOR
Manufacturer Motorola
Total Page 8 Pages
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