Part Number | HPTA40000 |
Manufacturer | HOPERF |
Title | High Temperature Pressure Sensor |
Description | HPTA40000 is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180°C. With advanced be... |
Features |
environment temperature exceeds 180 ℃. HPT sensors are produced first by ion implanting the four piezoresistors into silicon. The four resistors are connected in a Wheatstone bridge arrangement, whereby two resistors increase with positive pressure w...
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Datasheet | HPTA40000 Datasheet |