Part Number | HPTA2000 |
Manufacturer | HOPERF |
Title | High Temperature Pressure Sensor |
Description | HPTA2000 is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180°C. With advanced bea... |
Features |
ronment temperature exceeds 180 ℃. HPT sensors are produced first by ion implanting the four piezoresistors into silicon. The four resistors are connected in a Wheatstone bridge arrangement, whereby two resistors increase with positive pressure while...
|
Datasheet | HPTA2000 Datasheet |