Part Number | SM98A |
Manufacturer | Silicon Microstructures |
Title | Backside Absolute Pressure Sensor |
Description | The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM98A is designed for harsh media where absolute pressure needs to... |
Features |
• Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA) • On-Board temperature sensing diode • Small die (1.2 mm x 1.33 mm) • Backside entry for harsh environments • Backside metal option for eutectic bonding • 80 Millivolt output at 5V • All-silicon ... |
Datasheet | SM98A Datasheet |